| 摘要 |
PURPOSE:To evaluate the adsorption of sample gas at a super-high purity level for various kinds of materials. CONSTITUTION:Inactive gas of super-high purity is supplied into a sample pipe through a purifying device 1 (first gas supplying source). Then, the inside of the sample pipe 16 is baked with heaters 19-21 (heating means). Then, the inside of the sample pipe 16 is made to be atmosphere at a specified temperature. Thereafter, the opening and closing states of selector valves 9 and 20 are changed, and sample gas in specified concentration is made to flow into the sample pipe from a cylinder 6 (second gas supplying source). The gas is made to flow in until the adsorption of impurities is saturated, i.e., from the time when the sample gas is made to flow to the time when a microanalyzer 25 detects the sample gas having the specified concentration. |
