发明名称 |
Apparatus for the synthesis of diamond-like thin films |
摘要 |
Diamond-like thin films having high uniformity and high crystallinity are produced by introducing a hydrocarbon material gas into a chamber, ionizing the gas, and depositing the ionized gas on a substrate. The gas is ionized by thermionic emission from two or more files of hot cathodes, each file having a plurality of filaments arranged at substantially uniform intervals in a linear or zigzag line configuration. Each file of hot cathodes is surrounded separately by an anode at a substantially uniform distance from a respective file of the filaments.
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申请公布号 |
US5169452(A) |
申请公布日期 |
1992.12.08 |
申请号 |
US19920853349 |
申请日期 |
1992.03.16 |
申请人 |
TDK CORPORATION |
发明人 |
NAKAYAMA, MASATOSHI;UEDA, KUNIHIRO;SHIBAHARA, MASANORI |
分类号 |
C23C16/27;C23C16/50;C23C16/54 |
主分类号 |
C23C16/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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