OUTWARD APPEARANCE INSPECTION DEVICE FOR MOUNTED SUBSTRATE

摘要

PURPOSE:To improve the reliability of inspection by using stable brightness information which is not affected by the surface state of the substrate as to the mounted substrate outward appearance inspection device which uses a light. cutting method. CONSTITUTION:Brightness information is obtained by a 3rd brightness sensor 16 which detects a direct reflection component on the substrate in addition to two PSDs 10 and 11 which are used conventionally to obtain height and brightness data, and the brightness data with high reliability is obtained by a composing means which composes the brightness data, thereby adapting this device to the inspection of the substrate which is in an unstable surface state before.