DEVICE FOR INSPECTING APPEARANCE OF MOUNTING SUBSTRATE

摘要

PURPOSE:To improve the accuracy of inspection by detecting defective mounting such as the floating of a lead without being influenced by the warp of a substrate or the shift of a lead within a allowance. CONSTITUTION:A printed substrate 11 on which parts 12 are mounted is scanned with laser beams 16, its reflected beams are converged on a position detecting element 22 and the height data of the parts 12 mounted on the printed substrate 11 are computed based upon a position signal 23 outputted from the element 22. Within a mask set up on the mounting position of the parts 12, the height of the 2nd submask set up on a substrate face is subtracted from the height of the 1st submask to be moved on the upper face of a lead. A subtracted value larger than a computing threshold is set up as the height of the lead. Since the mounting state of the parts 12 is judged by a judging processing means 28 based upon the obtained height, defective mounting such as the floating of the lead can be detected without being influenced by the warp of the substrate or the shift of the lead with in the allowance.