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经营范围
发明名称
MACHINE DE DEPOT PAR PULVERISATION CATHODIQUE.
摘要
申请公布号
FR2668171(B1)
申请公布日期
1992.12.04
申请号
FR19900012897
申请日期
1990.10.18
申请人
ALCATEL CIT
发明人
RAVEL GUILLAUME
分类号
C23C14/34;H01J37/32;H01J37/34;H01L21/203;H05H1/46;(IPC1-7):C23C14/35
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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