| 摘要 |
<p>PURPOSE:To completely cover an opened part of a wafer carrier in order to prevent dust from sticking to a semiconductor wafer in relation to reconstruction of a wafer carrier to be used for storage or carrying of semiconductor wafers in a manufacturing process of a semiconductor device. CONSTITUTION:In a wafer carrier consisting of a holding plate 1 provided with a grip 2, two side plates whose one end is connected to the holding plate 1 at both ends of this holding plate 1 and a connecting plate 4 connecting the other end of these two side plates, it is so constituted that a cover plate 5 having an axis 5a turnable by fitting into a hole on the top of these two side plates, a plurality of cover plates refractably connected to this cover plate 5 and a latch 1a provided on this holding plate 1 to be engaged with an end part of this cover plate 10 are provided.</p> |
