METHOD AND DEVICE FOR ETCHING SEMICONDUCTOR FILM,申请号JP19910117591-传众专利搜索

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发明名称	METHOD AND DEVICE FOR ETCHING SEMICONDUCTOR FILM
摘要
申请公布号	JPH04349189(A)	申请公布日期	1992.12.03
申请号	JP19910117591	申请日期	1991.05.22
申请人	FUJITSU LTD	发明人	YAMAWAKI HIDEKI
分类号	C01G1/00;C01G3/00;C01G15/00;C01G29/00;C04B41/91;H01L21/306;H01L21/308;H01L39/24	主分类号	C01G1/00
代理机构		代理人
主权项
地址

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