发明名称
摘要 PURPOSE:To perform a wire bonding with suitable bonding strength and shape by providing regulating means for regulating the rising time to the normal output value of supersonic output waveform in the super sonic wave oscillator of a super sonic wire bonding apparatus. CONSTITUTION:A transducer 18 is vibrated by a supersonic wave output from a supersonic wave oscillator 17, and portions to be bonded are wire bonded by a bonding tool 20 disposed at the transducer. In a supersonic wave wire bonding apparatus 10, a rising regulating means for regulating the rising time to the normal output value of the supersonic output waveform is provided in the oscillator 17 to safely and effectively perform a wire bonding to the portions to be bonded in suitable bonding strength in response to the materials to be bonded and of wires and stable ball shape.
申请公布号 JPH0476501(B2) 申请公布日期 1992.12.03
申请号 JP19850103950 申请日期 1985.05.17
申请人 TOSHIBA SEIKI KK 发明人 SUZUKI HISAYA;ARIE MAKOTO
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
代理机构 代理人
主权项
地址
您可能感兴趣的专利