VAKUUMPUMPE MIT EINER EINRICHTUNG ZUR DREHZAHLMESSUNG.
摘要
The vacuum pump has a shaft in bearings in a plate (7), through which a stub end protrudes into a chamber. A rotary component (17) of ferromagnetic material contains recesses (18) at intervals round the periphery. The ferromagnetic component is level with a sensor (22). A permanent magnet is disposed on the housing wall (19). A wall of non-magnetic material separates the sensor from the chamber interior.
申请公布号
DE3875499(D1)
申请公布日期
1992.12.03
申请号
DE19883875499
申请日期
1988.02.02
申请人
LEYBOLD AG, 5000 KOELN, DE
发明人
AMRATH, HANS, W-4060 VIERSEN 1, DE;SZOECS, ZOLTAN, W-5300 BONN 2, DE
