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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04346451(A)
申请公布日期
1992.12.02
申请号
JP19910119783
申请日期
1991.05.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
NAKAJIMA MARI
分类号
H01L21/66;H01L21/82
主分类号
H01L21/66
代理机构
代理人
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