METHOD AND DEVICE FOR FORMING HYDROGENATED AMORPHOUS CARBON FILM ON BASE MATERIAL

摘要

PURPOSE:To provide the method and device for forming a hydrogenated amorphous carbon film on a substrate by increasing an optical band gap without lowering the physical hardness of the film and without lowering a film forming speed. CONSTITUTION:This method consists in cooling the substrate and using gas having a Penning effect as the diluting gas for gaseous methane and this device is constituted by installing a substrate cooler and a diluting gas introducing device to the chemical vapor deposition device using a high-frequency plasma discharge.