| 摘要 |
PURPOSE:To make it possible to obtain an effective bonding strength without fusing a low-melting point member by method wherein a heater block for heating pellet and a site, where a wire is press-bonded, of a lead is provided on a bonding stage via a heat insulating layer. CONSTITUTION:A bonding stage 15 has a stage main body 16 with a recessed part 16a formed in the central part of its upper surface and a heater block 18 arranged on the bottom wall of the recessed part 16a via a heat insulating layer (a heat insulating material) 17. There are heating heaters 19 in the interior of the block 18 and the heaters 19 heat and keep warm the block 18 connected to a temperature control device at a prescribed temperature. Moreover, there is an air supply path (a cooling means) 21, which is connected to an air source and is used as a cooling means for supplying cooling air to a heat insulating layer 20, in the main body 16. Thereby, even if there is a low-melting point member of a site, where a wire (a gold wire) 3 is not press-bonded, of a lead (a lead part) 6, it becomes possible to perform a wire bonding having a sufficient bonding strength without fusing this low-melting point member. |
