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发明名称
MAGNETRON SPUTTERING DEVICE
摘要
申请公布号
JPH04346660(A)
申请公布日期
1992.12.02
申请号
JP19910118692
申请日期
1991.05.23
申请人
NISSIN ELECTRIC CO LTD
发明人
MAENO SHUICHI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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