| 摘要 |
PURPOSE:To prevent damage to an object to be detected by moving it against a laser beam with a moving means of the object to be detected, simultaneously detecting the position of the object with a detecting means of the laser beam position and thereby detecting the position of the laser beam. CONSTITUTION:When the object for temperature detection 203 is brought close to the laser beam 501 or a part of the beam is received, the temperature of the object 203 rises. If the temperature of the object is higher than a set temperature, the output voltage of a voltage amplifier becomes negative, the object 203 is moved to the left direction by a servo motor 205 and the temperature of the object falls. If the temperature of the object 203 is lower than the set temperature, the object 203 is moved to the right direction and the temperature of the object rises. By detecting the position of the object 203 for the temperature detection via an encoder 206, the position of the laser beam 501 relative to the direction for the fixed position of the object 203 is indirectly detected. |
