METHOD AND APPARATUS FOR ION IMPLANTATION,申请号JP19910114711-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR ION IMPLANTATION
摘要
申请公布号	JPH04342125(A)	申请公布日期	1992.11.27
申请号	JP19910114711	申请日期	1991.05.20
申请人	MATSUSHITA ELECTRON CORP	发明人	FUJII SHINJI
分类号	H01L21/265;H01L21/8238;H01L27/092	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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