| 摘要 |
PURPOSE:To improve characteristics of product, to reduce tensile strength during drawing and to prevent occurrence of crack of product in a cast ribbon method of continuously drawing molten silicon, put in a mold nozzle under pressure, as a solidified silicon sheet by a drawing jig to give a product by properly controlling temperature of the mold nozzle. CONSTITUTION:A mold nozzle 5 is preheated to >=a melt point MP of Si, molten silicon is fed to the nozzle under pressure up to a drawing jig 7 and a gradual temperature drop from the side of the drawing jig 7 to the mold nozzle 5 is controlled so that a boundary line 5g of molten silicon and a solidified silicon sheet MSi is formed at the tip side of the mold nozzle 5, then molten silicon is pressurized, the drawing jig 7 is pulled out and the solidifed silicon sheet MSi is continuously drawn out to the outside of an inert atmosphere 1a to give the objective polycrystalline silicon sheet. |
