| 摘要 |
The device for removing foreign substances attatched to the surface of IC packages consists of a boat holder (2) fixed on pair of bearing housing members (10A,10B), a pair of rails (3A) mounted between both supporting dies (4A,4B), and a injector supporting die (5), which is mounted on both sides of the central part of the guide rails and supports a number of injectors (11A,11B) and injector supporting bars (5A,5B). The injectors inject compressed air and ions on the surface of the package (30) on the boat (20) by the operation of a limit switch (9) activated by a step of one of the bearing housing members (10B), when the boat holder with boat goes under the injectors, so that static electicity is extinguished and foreign substances are removed.
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