METHOD FOR COATING AMORPHOUS COMPOUNDS THIN LAYERS OF THE KIND SIxNy/SIxNyHz DESTINED FOR SILICON PLANAR TECHNOLOGY IN ELECTRONIC DEVICES PRODUCTION,申请号RO19880133245-传众专利搜索

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发明名称	METHOD FOR COATING AMORPHOUS COMPOUNDS THIN LAYERS OF THE KIND SIxNy/SIxNyHz DESTINED FOR SILICON PLANAR TECHNOLOGY IN ELECTRONIC DEVICES PRODUCTION
摘要
申请公布号	RO101060(B1)	申请公布日期	1992.11.26
申请号	RO19880133245	申请日期	1988.04.27
申请人		发明人
分类号	C23C16/18;(IPC1-7):C23C16/18	主分类号	C23C16/18
代理机构		代理人
主权项
地址

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