INSPECTING DEVICE FOR SURFACE CONDITION,申请号JP19910077222-传众专利搜索

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发明名称	INSPECTING DEVICE FOR SURFACE CONDITION
摘要
申请公布号	JPH04339244(A)	申请公布日期	1992.11.26
申请号	JP19910077222	申请日期	1991.03.18
申请人	CANON INC	发明人	KONO MICHIO
分类号	G01B11/30;G01N21/88;G01N21/94;G01N21/956;H01L21/66	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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