| 摘要 |
PURPOSE:To allow laser processing without having anisotropy of processing with high performance by forming a reflection mirror turnable around the axis of a laser beam and controlling this mirror in such a manner that the moving direction of a work piece and the polarization direction of a linearly polarized beam align. CONSTITUTION:The reflection mirror 13 which is an optical element to select polarization components is disposed between resonance mirrors 11 and 12. A total reflection mirror 12 and the reflection mirror 13 for polarization selection are integrated and are housed in a rotating block 14. The moving direction of the work piece 7 is detected by a sensor 72 and is fed back to a reflection mirror rotating mechanism 141 which controls the rotation of the rotating block 4 so as to align the moving direction of the work piece 7 and the polarization direction of the laser beam 2. Since the axis of polarization of the linearly polarized laser beam 2 aligns to the moving direction of the work piece at all times, the high-quality laser processing free from the anisotropy of the processing is execute with the high performance. |
