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发明名称
MANUFACTURING OF THREE-DIMENSIONAL FORCE PERCEIVING SENSOR
摘要
申请公布号
JPH04339228(A)
申请公布日期
1992.11.26
申请号
JP19910017638
申请日期
1991.02.08
申请人
ENPLAS CORP
发明人
EBINA TSUDOI
分类号
G01L1/18;G01L1/22;G01L5/16;H01L29/84
主分类号
G01L1/18
代理机构
代理人
主权项
地址
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