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发明名称
MICROMECHANICAL ELEMENT
摘要
申请公布号
EP0478956(A3)
申请公布日期
1992.11.25
申请号
EP19910114504
申请日期
1991.08.29
申请人
KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH
发明人
BLEY, PETER, DR.;MOHR, JUERGEN, DR.
分类号
H01H1/00;H01H61/013;(IPC1-7):H01H1/00
主分类号
H01H1/00
代理机构
代理人
主权项
地址
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