| 摘要 |
<p>PURPOSE: To improve the step coverage of a metallic electrode formed on a substrate and an insulating layer, formed on the metallic electrode. CONSTITUTION: A process for pattern-forming a first metallic laser 11 constituted of a material, which is not anode-oxidized on the substrate in prescribed first thickness and a process for forming a second metallic layer constituted of a material which can be anode-oxidized, are provided. A process for forming a resist 13, corresponding to the first metallic layer 11 which is patterned and anode-oxidizing an area from which the first and second metallic patterns are removed in the same level as the surface of the substrate with the resist as a mask, so as to form a flat face is contained.</p> |
