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发明名称
SURFACE TREATMENT
摘要
申请公布号
JPH04337634(A)
申请公布日期
1992.11.25
申请号
JP19910110124
申请日期
1991.05.15
申请人
HITACHI LTD
发明人
ONO TETSUO;KURE TOKUO;HIRAOKA SUSUMU;SUZUKI KEIZO
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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