发明名称 LIMIT DETECTING DEVICE OF DIEEBONDER
摘要 PURPOSE:To make the limit detecting device of the die-bonder extremely compact by a method wherein a limit detecting plate is equipped being hanged from a ring holder concentrically with a die feeding ring. CONSTITUTION:A needle guide 7 goes up to absorb an adhesive sheet 2, and an arm 6 is made to rise by a cam mechanism to push up a die 1 with a needle 5. A nozzle 4 comes down to absorb and to transfer the die to a substrate, and returns again to the upper part of the needle 5. The needle 5 and the needle guide 7 come down, and a table 11 is driven 12 to be transferred by one pitch. Those actions are performed in the region within the transferring range of the die feeding ring 3. When the actions go over the transferring range by trouble, the inner circumference of the detecting plate 14 comes in contact with the needle guide 7. Therefore holes 14a, 14b, displace out of the optical axes to shade sensors 18, 19. The feeding ring 3 is transferred within the prescribed range by the detecting signal controlling the table 11. When the detecting plate 14 separates from the needle guide 7, it returns to the original position by springs 15-17. By this constitution, the device can be made compact.
申请公布号 JPS5681938(A) 申请公布日期 1981.07.04
申请号 JP19790128616 申请日期 1979.10.05
申请人 SHINKAWA KK 发明人 KAWAGISHI MINORU
分类号 H01L21/67;H01L21/52;H01L21/58;(IPC1-7):01L21/58 主分类号 H01L21/67
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