| 摘要 |
The invention relates to an interferometer sensor for measuring distance changes of a small surface. The sensor defines a Mirau-like interferometer arrangement having a measurement surface and a reference surface. For making precise measurements of a small distance change, a retarder is arranged between these surfaces and effects a difference of the path differences between a measurement beam and a reference beam of approximately lambda /4 for two polarization directions. The powers of the radiation components with these polarization directions are measured by a detecting device. The detecting device includes a polarization-dependent beam splitter and two detectors.
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