| 摘要 |
<p>PURPOSE:To provide the confocal optical scanner which is improved in light utilization efficiency and reduces stray light from the surface of a pinhole substrate. CONSTITUTION:The confocal optical scanner rotates the pinhole substrate 10 and scans a sample with irradiation light passed through the pinhole substrate, and the pinhole substrate is equipped with plural light converging means and plural pinholes 14 arranged at the focus positions of the ligyt converging means. A Fresnel lens 13, a quadratice surface mirror or a small convex lens type microleses or distributed refractive index type plane microlenses are used as the light converging means. The light converging means form a light converging means group which have constatn width in a radial direction and is arranged in array in a circumerential direciton including means having focuses outside respective aperture pupils and the radial irradiation range of illumination light irradiating the light converging means group is limited to only the radial width of the light converging means group.</p> |
