| 摘要 |
PURPOSE:To perform thin film sample X-ray diffraction more precisely by making the X-rays fed to a thin film sample monochromatic and parallel. CONSTITUTION:X-rays from an X-ray source 2 are fed to a thin film sample 10 via the first slit 4, an incidence side monochrometer 6 and the second slit 8, and the X-rays diffracted here are detected by an X-ray detector 16 through a solar slit 12 and a reflection side monochrometer 14. The solar slit 12, reflection side monochrometer 14 and X-ray detector 16 are mounted on an angle measuring base 18, and the angle measuring base 18 can be rotated centering on the thin film sample 10. X-rays fed to the thin film sample 10 are made monochromatic and parallel by the flat plate-shaped incidence side monochrometer 6. |
