发明名称 WASTE GAS ADSORBER
摘要 <p>PURPOSE:To safely and effectively treat a waste gas without leaking a harmful gas on the downstream side of an adsorber while recognizing the treating condition of the adsorber by providing the gas sampling port and return gas inlet communicating with a gas detector to a space between the main treating part and auxiliary treating part. CONSTITUTION:A main treating part 2 having a waste gas inlet 5 and packed with an adsorbent and an auxiliary treating part 4 having a treated gas outlet 6 and packed with an adsorbent are provided in a waste gas adsorber 1. A space 3 is formed between the main treating part 2 and the auxiliary treating part 4, and the gas sampling port 7 and return gas inlet 8 communicating with a gas detector 10 are furnished to the space 3. Consequently, the treating condition of the main treating part is surely detected, a harmful gas beyond the maximum allowable concn. is not leaked from the auxiliary treating part, and the entire system is controlled more safely and economically.</p>
申请公布号 JPH04330914(A) 申请公布日期 1992.11.18
申请号 JP19910016746 申请日期 1991.01.18
申请人 EBARA RES CO LTD;EBARA CORP;EBARA INFILCO CO LTD 发明人 MORI YOICHI;FUKUNAGA AKIRA
分类号 B01D53/04;B01D53/30;B01D53/34;B01D53/81 主分类号 B01D53/04
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