发明名称 FORMATING METHOD OF MATCHING DOMAIN
摘要 PURPOSE:To enable the matching area with small dimension independently of the photo etching method, by forming the opening to the mask containing inpurity provided on the base, further by providing the second inpurity introducing mask in it, and by introducing the inpurity after narrowing the width of the opening with the exposure and photo etching from the tilt angle by coating the photo sensitive resin.
申请公布号 JPS52109879(A) 申请公布日期 1977.09.14
申请号 JP19770007839 申请日期 1977.01.28
申请人 KOGYO GIJUTSUIN 发明人 HAYASHI YUTAKA
分类号 H01L29/762;H01L21/22;H01L21/306;H01L21/339;H01L29/768 主分类号 H01L29/762
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