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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04328845(A)
申请公布日期
1992.11.17
申请号
JP19910125415
申请日期
1991.04.27
申请人
ROHM CO LTD
发明人
TAKASU HIDESHI
分类号
H01L21/225;H01L21/3205;H01L21/74;H01L23/52
主分类号
H01L21/225
代理机构
代理人
主权项
地址
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