METHOD OF FABRICATION OF AIR/FUEL SENSORS BASED ON ELECTROCHEMICAL PUMPING

摘要

A method is disclosed for making planar oxygen-solid electrolyte sensors. The method involves coating the several layers onto a support, selectively etching an etchable layer to form areas wherein the electrode layers and electrolyte layers may be formed thereon and, finally, etching the etchable layer totally away in order to form a chamber therein.