PASTE FOR HEATING RESISTOR FOR ALN CERAMIC HEATER

摘要

PURPOSE:To provide a resistor having proper resistance as a heating resistor for an AlN ceramic heater and satisfactory adhesion to AlN and hardly undergoing a change in the resistance after use. CONSTITUTION:Tungsten powder of 1.3mum average particle diameter is blended with WO2 powder of 10mum and WO3 powder of 10mum in 3:2:1 weight ratio, AlN powder is added to the blend in 1:1 volume ratio and paste is prepd. A heat pattern 2 is formed on an AlN green sheet 1 by printing with the paste and the sheet 1 is fired.