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发明名称
INTERFEROMETER
摘要
申请公布号
JPH04323502(A)
申请公布日期
1992.11.12
申请号
JP19910091952
申请日期
1991.04.23
申请人
NIKON CORP
发明人
SUEYOSHI MASASHI
分类号
G01B9/02;G01J3/45
主分类号
G01B9/02
代理机构
代理人
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