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发明名称
TARGET FOR SPUTTERING AND ITS PRODUCTION
摘要
申请公布号
JPH04323366(A)
申请公布日期
1992.11.12
申请号
JP19910115463
申请日期
1991.04.19
申请人
ASAHI GLASS CO LTD
发明人
MITSUI AKIRA
分类号
C23C14/34;H01L21/285
主分类号
C23C14/34
代理机构
代理人
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