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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04322448(A)
申请公布日期
1992.11.12
申请号
JP19910118115
申请日期
1991.04.22
申请人
NEC CORP
发明人
SUZUKI MIEKO
分类号
H01L21/306;H01L21/31;H01L21/312;H01L21/316;H01L21/768
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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