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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04321228(A)
申请公布日期
1992.11.11
申请号
JP19910090169
申请日期
1991.04.22
申请人
TOSHIBA CORP;TOSHIBA MICRO ELECTRON KK
发明人
MURANAKA TERUKAZU;YAMASHITA TAKASHI
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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