| 摘要 |
<p>PURPOSE:To perform pattern matching at high speed and with high accuracy. CONSTITUTION:By taking in a mark, whose shape is known, with a light view optical system, and adding it in the direction perpendicular to the cross section and differentiating it, and taking the absolute value, a measured pattern being divided into blocks is gotten, and based on the known mark shape, the operation with the presumed pattern being divided in blocks is performed, and based on it, the evaluation function concerning the position of the matching degree of the mark at large is set to detect the position.</p> |
