| 摘要 |
<p>PURPOSE:To enable the stable operation for the continuous production of monosilane for a long period with reduced energy consumption, by combining specific processes using trichlorosilane as a dusproportionation catalyst, and carrying out the disproportionation reaction simultaneously to the distillation separation process. CONSTITUTION:Trichlorosilane and a chlorosilane-disproportionation catalyst consisting of a tertiary amine having 4-12C alkyl and its hydrochloride are supplied to the first column to effect the simultaneous disproportionation reaction and the distillation at specific temperature and pressure, and the silane mixture composed mainly of dichlorosilane is discharged from the top of the column. The catalyst mixture liquid containing trichlorosilane and silicon tetrachloride is discharged from the system through the column bottom (the step A). The catalyst mixture liquid discharged from the system in the step A is evaporated to effect the separation of the catalyst liquid from the silane mixture (the step B). The silane mixture discharged from the system in the step A and the catalyst liquid separated in the step B are supplied to the second column, and are subjected to the simultaneous reaction and distillation at specific temperature and pressure (the step C). Trichlorosilane composed mainly of monosilane is obtained by this step, and the catalyst mixture is recycled to the first column.</p> |
