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发明名称
SPUTTERING DEVICE AND FORMATION OF ELECTRODE FILM
摘要
申请公布号
JPH04314862(A)
申请公布日期
1992.11.06
申请号
JP19910108511
申请日期
1991.04.12
申请人
RICOH CO LTD
发明人
MATSUMOTO SHOJI
分类号
C23C14/50;H01L21/203;H01L21/285
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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