MASS FLOW CONTROLLER,申请号JP19910074862-传众专利搜索

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发明名称	MASS FLOW CONTROLLER
摘要
申请公布号	JPH04313107(A)	申请公布日期	1992.11.05
申请号	JP19910074862	申请日期	1991.04.08
申请人	MITSUBISHI ELECTRIC CORP	发明人	ODA TAKAFUMI
分类号	G05D7/06;H01L21/205	主分类号	G05D7/06
代理机构		代理人
主权项
地址

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