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发明名称
摘要
申请公布号	JPH04122442(U)	申请公布日期	1992.11.04
申请号	JP19910033820U	申请日期	1991.04.16
申请人		发明人
分类号	B23Q17/24;B28D5/00;B28D7/00;H01L21/301;H01L21/78;(IPC1-7):B23Q17/24	主分类号	B23Q17/24
代理机构		代理人
主权项
地址

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