MANUFACTURE OF SEMICONDUCTOR THIN FILM,申请号JP19910076414-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR THIN FILM
摘要
申请公布号	JPH04311029(A)	申请公布日期	1992.11.02
申请号	JP19910076414	申请日期	1991.04.09
申请人	SEIKO EPSON CORP	发明人	SHIMOBAYASHI TAKASHI
分类号	H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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