| 摘要 |
PURPOSE:To obtain patterns having high durability when patterned resists formed by means of lithography are laminated in manufacturing a liquid jet record head. CONSTITUTION:Novolak positive type resists 3 are layered on a substrate 1, and patterns are exposed and developed sequentially so as to form an ink liquid passage equivalent section 4. Thereafter, the section 4 is irradiated with ultraviolet rays so as to form a cross linking layer 6 on the outer surface of the section 4, so that solvent resistance will be raised. After it is coated with a resin 7, a liquid chamber 9 is formed and a roof 10 is connected. |
