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发明名称
MANUFACTURE OF SEMICONDUCTOR CIRCUIT
摘要
申请公布号
JPH04307932(A)
申请公布日期
1992.10.30
申请号
JP19920029925
申请日期
1992.01.22
申请人
AMERICAN TELEPH & TELEGR CO <ATT>
发明人
IYU MAN UON;CHIENNFUA DAGURASU YU
分类号
H01L21/28;H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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