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发明名称
INSTALLATION FOR PLASMA DEPOSITION
摘要
申请公布号
RU888363(C)
申请公布日期
1992.10.30
申请号
SU19802906117
申请日期
1980.04.04
申请人
CHERKASSKIJ PK T INSTITUT
发明人
MERKIN V.M.,SU;OSTILOVSKIJ O.A.,SU;PEDENKO P.A.,SU;SHCHERBAK N.I.,SU
分类号
B05B13/02;B05B7/22
主分类号
B05B13/02
代理机构
代理人
主权项
地址
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