| 摘要 |
PURPOSE:To easily recognize a transporting order to destined treating machines to which the substrates are transported by displaying correspondingly and making visible the transporting order of the substrates and the destined treating machines to which the substrates are actually transported based on such transporting order. CONSTITUTION:Based on the transporting order of the substrates to the plural treating machines 31-35 including rotary treating machines 31, 32 by which a rotary treatment is applied on the substrates with a required treating liquid, the substrates are successively transported to the corresponding treating machines among the plural treating machines 31-35 and treated by the treating machines to which the substrates are transported. And, at a display means 5b, the corresponding treating machines to which the substrates are transported and the transporting order of the substrates based on the order of transportation to the corresponding machines are correspondingly displayed. Consequently, the transporting order to the destined treating machines to which the substrates are transported is easily recognized. |
