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发明名称
TRANSFER ARM
摘要
申请公布号
JPH04305956(A)
申请公布日期
1992.10.28
申请号
JP19910069807
申请日期
1991.04.02
申请人
TOKYO ELECTRON LTD
发明人
KIRIYAMA KENJI;ASAKAWA TERUO;TOMOYOSHI TSUTOMU
分类号
H01L21/677;B25J15/06;B25J19/02;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
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