Deformable mirror shutter device.

摘要

A device comprising a micro-mechanical switch which includes an electrode (38a, 38b) a gap between the electrode and an individually deflectable element (32), which has a vertical shutter (40) attached to its underside. When the electrode is addressed the movement of the deflectable element (32) causes the shutter to raise or lower. Such a device can be used in switching. One embodiment of such a use in waveguides is disclosed along with the method of manufacture. <IMAGE>