| 摘要 |
PURPOSE:To simplify a preliminary confirming operation for rotation for the purpose of confirming in advance the state of the rotation of a substrate by waiting for the setting of substrate revolution, when a number of revolution measuring mode is selected from various maintenance modes on a main operating panel, rotating the substrate at the set number of revolution and allowing the measurement of the number of revolution of the substrate itself. CONSTITUTION:When a number of revolution measuring mode is selected from various maintenance modes on a main operating panel, the substrate number of revolution is set first, then by way of the transportation of the substrate to a rotating body by means of substrate transporting means 31, 32 and after the setting of the substrate, the substrate is rotated at the set number of revolution, and the measurement of the number of revolution of the substrate itself is made possible. Consequently, the preliminary confirming operation for the rotation for the purpose of confirming in advance the state of the rotation by rotating a rotating machine prior to the substrate processing is simplified. |
